Control system for a scanner drive

US6037583A · kind A · utility

Assignee

• Carl Zeiss Jena GmbH · DE

Inventors

• Gunter Moehler · Jena, DE
• Guenter Schoeppe · Jena, DE
• Sebastian Tille · Marburg, DE

Key dates

• Filing date: Jan 21, 1998
• Grant date: Mar 14, 2000
• Expiry date: Jan 21, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/002
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A control system for a scanner is disclosed, especially for a laser scanning microscope, with an oscillating motor for driving an oscillating mirror serving for the linearly oscillating deflection of a beam bundle, with a control unit for supplying the oscillating motor with an exciting current which is variable with respect to the control frequency, frequency curve, and amplitude, with a function generator which is connected with the control unit, and with a measurement value transducer for obtaining a sequence of information about the deflection positions of the oscillating mirror. The measurement value transducer is connected with the function generator by way of a logic unit for determining correction values for the exciting current. Accordingly, it is advantageously possible, by evaluating the information supplied by the measurement value transducer about the actual deflection position of the oscillating mirror, to determine correction values with the assistance of the logic unit. These correction values can be used, in turn, to influence the control frequencies emitted by the function generator in such a way that deviations are minimized or completely prevented.