Grid-actuated charge controlled mirror and method of addressing the same
US6038058A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 1998 |
| Grant date | Mar 14, 2000 |
| Priority date | — |
| Expiry date | Oct 15, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromirror light valve target configuration that overcomes the problems of limited deflection range, electrostatic and resolution by forming the secondary electron collector grid of a fine conductive mesh and placing it in close proximity to the micromirror array. The source, preferably a fixed beam array, addresses the micromirror array such that it exhibits a secondary emission coefficient less than one to write a negative charge pattern onto the mirrors so that they are attracted to the collector grid. If the anode is also in close proximity to the array, the mirrors can be addressed so that they deflect up toward the grid and down toward the anode thereby increasing the deflection range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.