Apparatus and method for calibrating pressure existing between optical fibers and a polishing pad during a polishing process
US6039630A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1998 |
| Grant date | Mar 21, 2000 |
| Priority date | — |
| Expiry date | Feb 27, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3863
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A calibration apparatus and method for a polishing machine includes a ferrule surrounding a polishing pad and a plurality of sensors attached to the ferrule. Each of the sensors is directed at a location where optical fibers extending downwardly from a leveling device contact the polishing pad. The sensors are infrared sensors that detect a heat signature generated by friction at the contact point between the optical fibers and the polishing pad as the polishing pad spins and revolves relative to the leveling device. The heat signature that is generated corresponds to the pressure existing between the optical fibers and the polishing pad.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.