Cleaning method utilizing degassed cleaning liquid with applied ultrasonics
US6039814A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jul 3, 1997 |
| Grant date | Mar 21, 2000 |
| Priority date | — |
| Expiry date | Jul 3, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B2203/002
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cleaning method comprising the steps of degassing gas dissolved in a cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Also included, is a cleaning method comprising the steps of: degassing gas dissolved in a surface-active agent-containing cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Water vapor may be used to sweep gas from a degassing device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.