Optical phase-shift triangulation technique (PST) for non-contact surface profiling
US6040910A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 1998 |
| Grant date | Mar 21, 2000 |
| Priority date | — |
| Expiry date | May 20, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2527
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is an optical system for profiling a surface of an object. The optical system includes a projection system for directing an incident beam of light having a varying intensity pattern onto the surface of the object. The projection system includes a filter or the like for reducing or attenuating high order harmonics from the varying intensity pattern. The varying intensity pattern of the incident light beam is spatially shifted N times, where N is greater than 2. A detector array is arranged relative to the surface of the object to receive a reflected deformed grating image of the surface. A processing system, coupled to the detector array, determines a surface profile of the object based on a number of the deformed grating image at different spatial phases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.