Piezoelectrically actuated fluid pumps
US6042345A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 1998 |
| Grant date | Mar 28, 2000 |
| Priority date | — |
| Expiry date | Apr 3, 2018 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B43/14
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A piezoelectrically actuated fluid pump including a pump housing, a pump chamber, inlet and outlet ports for communicating the pump chamber with the exterior of the pump housing, valving means for opening and closing the ports, two pre-stressed piezoelectric diaphragm members which are self-actuated, and energizing means is provided. The diaphragm members include a prestressed piezoelectric element which is durable, inexpensive and lightweight as compared with diaphragm members of prior diaphragm pumps of comparable discharge capacity, and is actuated via electrical signals from an outside power source. No exterior mechanical means for driving the diaphragm members is necessary. A modification is disclosed in which a central computer independently controls the phase angle of oscillation of the two diaphragm members, providing precise flow rate control.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.