Patent · US Expired

Radiation sensitive compositions of terpolymers containing organosilicon side chains

US6042989A · kind A · utility

21Cited by

5References

9Claims

0Family size

Assignee

Olin Microelectronic Chemicals, Inc. · US

Inventors

Ulrich Schaedeli · Plasselb, CH
Eric Tinguely · Fribourg, CH
Manfred Hofmann · Hettstadt, DE
Pasquale Alfred Falcigno · Yonkers, US
Carl-Lorenz Mertesdorf · Wetzikon, CH

Key dates

Filing date	Oct 26, 1998
Grant date	Mar 28, 2000
Priority date	—
Expiry date	Oct 26, 2018

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/0045
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A radiation sensitive composition comprising (a) a terpolymer containing 20 to 70 mole percent of an acid-labile repeating unit, 3 to 40 mole percent of an acrylic or acrylonitrile based repeating unit and a repeating unit containing silicon side-chains and (b) a photo-acid generator. The silicon content of terpolymer is 7 to 20 weight percent. The composition is used primarily in the formulation of multilayer positive operating photoresists.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.