Infrared sensor and method for compensating temperature thereof
US6043493A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 1998 |
| Grant date | Mar 28, 2000 |
| Priority date | — |
| Expiry date | Jan 21, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Infrared sensor that can make a temperature compensation by itself, and method for compensating a temperature thereof, are disclosed. The infrared sensor preferably includes a substrate, a diaphragm formed on the substrate, and a first thermopile sensor formed on a region of the diaphragm for sensing an infrared radiation emitted from a measured object and infrared radiations emitted from regions other than the measured object. A second thermopile sensor is formed on a region of the diaphragm and connected to the first thermopile sensor for sensing the infrared radiations emitted from the regions other than the measured object. A housing protects a front face of the substrate including the first, and second thermopile sensors includes an infrared filter in the housing over the first and second thermopile sensors for transmission of infrared radiations, and a reflector reflects the infrared radiation emitted from the measured object toward the first thermopile sensor. The method for temperature compensation can include the steps of letting an infrared radiation from a measured object be directed to the first thermopile sensor and letting infrared radiations from regions other than t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.