Patent · US Expired

Fringe deflectometry apparatus and method

US6043885A · kind A · utility

37Cited by
2References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 8, 1998
Grant dateMar 28, 2000
Priority date
Expiry dateJan 8, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01M11/0242
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A fringe deflectometry apparatus illuminates an optical component to be measured using radiation with a known wavefront, deflects the radiation after it has been reflected or transmitted by the optical component to be measured, and materializes a reference ray. Transverse aberration of the reference ray after reflection or transmission by the optical component is measured. A deflectometry method using the apparatus enables an absolute phase reference to be provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.