Method for producing ceramic diaphragm structure
US6045642A · kind A · utility
16Cited by
6References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 1999 |
| Grant date | Apr 4, 2000 |
| Priority date | — |
| Expiry date | Apr 6, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2048
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method for producing a ceramic diaphragm structure includes preparing a ceramic green substrate having at least one window and a plurality of layers, and a thin ceramic green sheet. The ceramic green sheet is superposed on the ceramic green substrate to cover the window and thereby provide a unitary laminate. The laminate is then fired so that the ceramic green sheet provides a diaphragm portion which protrudes in a direction away from the window. The average sintering temperature difference or the average shrinkage-rate difference, of the layers of the ceramic green substrate, is larger than zero.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.