Delivery system and manifold
US6047744A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 8, 1999 |
| Grant date | Apr 11, 2000 |
| Priority date | — |
| Expiry date | Jun 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/3127
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
This invention concerns a manifold for use in refill of canister containing chemicals. The manifold may comprise a vacuum supply valve; a vacuum generator; a pressure vent valve; a gas inlet valve; a bypass valve; an isolation valve; a control valve; a canister inlet valve; a canister outlet valve; a canister inlet coupler, and a canister outlet coupler. In the manifold the vacuum supply valve may be connected to the vacuum generator; the vacuum generator may be connected to the pressure vent valve and the control valve; the gas inlet valve may be connected to pressure vent valve and bypass valve; the bypass valve may be further connected to the isolation valve and the canister inlet valve; the isolation valve may also be connected to the canister outlet valve. In addition, the canister inlet valve may be connected to control valve, the canister inlet coupler, and the canister outlet valve; and the canister outlet valve may be further connected to the canister inlet coupler and the canister outlet coupler.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.