Patent · US Expired

Laser bar cleaving apparatus

US6048747A · kind A · utility

6Cited by
12References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 1, 1998
Grant dateApr 11, 2000
Priority date
Expiry dateMay 1, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/0202
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A cleaving apparatus for separating a wafer (or bar) bar of optical devices into separate bars (or individual optical devices) comprises a relatively thin wire, preferably tungsten. The wire is forced against the underside of the bar directly underneath the location of a top side scribe mark. The wire, having a highly uniform, well-controlled radius of curvature, induces a known, reproducible stress through the body of the bar and nucleates a cleavage crack under the scribe mark. A force applied to the top surface of the bar will allow the cleaving crack to propagate cleanly along a single crystal surface through the depth of the bar to the location of the wire.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.