Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
US6049158A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1995 |
| Grant date | Apr 11, 2000 |
| Priority date | — |
| Expiry date | Feb 9, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and a diaphragm portion for closing each window, and a film-like piezoelectric/electrostrictive unit formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes outwards, in a direction away from the corresponding window. The piezoelectric/electrostrictive unit includes a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of the diaphragm portion by a film-forming method. Also disclosed is a method of producing the piezoelectric/electrostrictive film element as described above.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.