Modular filter fan unit
US6050774A · kind A · utility
29Cited by
16References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 14, 1998 |
| Grant date | Apr 18, 2000 |
| Priority date | — |
| Expiry date | Oct 14, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2279/51
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A modular fan filter unit designed to supply process control air to mini-enclosure clean rooms. The modular fan filter unit is easy to remove, repair, and replace in the clean room environment. It has a readily accessible filter mounted across its bottom surface and an internal variable frequency drive fan. The fan pushes air through the filter into a clean room. Multiple numbers of modular fan filter units may be connected together as an array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.