Patent · US Expired

Optical unit

US6051838A · kind A · utility

6Cited by

5References

23Claims

0Family size

Assignee

ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung · DE

Inventors

Jürgen Frosien · Riemerling, DE
Stefan Lanio · Erding, DE
Reinhold Schmitt · Munich, DE
Gerald Schonecker · Munich, DE

Key dates

Filing date	Oct 8, 1997
Grant date	Apr 18, 2000
Priority date	—
Expiry date	Oct 8, 2017

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/1207
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contact with a high-resistance body having a channel therethrough for the particle beam. A further component is provided for influencing the particle beam in the region of the electrostatic lens.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.