Thin-film multilayered electrode, high-frequency transmission line, high-frequency resonator, and high-frequency filter
US6052043A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 1998 |
| Grant date | Apr 18, 2000 |
| Priority date | — |
| Expiry date | Oct 21, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P3/081
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A thin-film multilayered electrode has a dielectric substrate; a ground conductor provided on a back surface of the dielectric substrate; and a plurality of thin-film conductive layers and dielectric layers alternately stacked on a front surface of the dielectric substrate. In one example, the ground conductor, one of the thin-film conductive layers in contact with the dielectric substrate and the dielectric substrate interposed therebetween form a TEM mode principal transmission line, and each thin-film dielectric layer and a pair of thin-film conductive layers sandwiching the thin-film dielectric layer form a TEM mode sub-transmission line. A thickness and a dielectric constant of each thin-film dielectric layer is set such that phase velocities of TEM waves which propagate through the TEM mode principal transmission line and the TEM mode sub-transmission lines are substantially identical with each other. A thickness of each thin-film conductive layer is set at a predetermined value which is smaller than a skin depth at a predetermined operating frequency such that electromagnetic fields between the TEM mode principal transmission line and its adjacent TEM mode sub-transmission l…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.