Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission
US6052238A · kind A · utility
101Cited by
18References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1999 |
| Grant date | Apr 18, 2000 |
| Priority date | — |
| Expiry date | Apr 1, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y10/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A metallic film has apertures located therein in an array arranged in a pattern so that when light is incident on the apertures, surface plasmons on the metallic film are perturbed resulting in an enhanced transmission of the light emitted from individual apertures in the array. The aperture array is used: to filter light of predetermined wavelength traversing the apertures, to collect light over a distance after traversing the apertures, to improve operation of near-field scanning optical microscopes, and to enhance light transmission through masks useable in photolithography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.