Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithography
US6054248A · kind A · utility
11Cited by
14References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 1999 |
| Grant date | Apr 25, 2000 |
| Priority date | — |
| Expiry date | Mar 12, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/111
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is directed to a thermally curable polymer composition comprising a hydroxyl-containing polymer and a polyfunctional isocyanate as a crosslinking agent, which is particularly useful in photolithographic coating of substrates. The thermally curable polymer composition may be dissolved in a solvent and used as an undercoat layer in deep UV lithography. Furthermore, the present invention further relates to a process for using the photolithographic coated substrate for the production of relief structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.