Integrated electrostatically-actuated micromachined all-metal micro-relays
US6054659A · kind A · utility
97Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1998 |
| Grant date | Apr 25, 2000 |
| Priority date | — |
| Expiry date | Mar 9, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0057
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Structures and fabrication methods of micromachined all-metal relays on silicon chips are described. The relay comprises a copper blade, electroformed into the lithographically patterned areas, with suitable dimensions of 1 mm.times.2 mm.times.0.01 mm (width.times.length.times.thickness) and a plurality of longitudinal slots to facilitate fabrication of the blade. The relay is actuated by electrostatic force, and no conduction current is required to hold the relay at either "on" or "off" state. Preferably, the relay is used in combination with a suitable arc suppression circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.