Patent · US Expired

Semiconductor device

US6054752A · kind A · utility

65Cited by
9References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 1998
Grant dateApr 25, 2000
Priority date
Expiry dateJun 30, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8325

Abstract

A semiconductor device comprises a semiconductor substrate including a first conductivity type first semiconductor layer and a second conductivity type second semiconductor layer formed on the first semiconductor layer. A unit cell for controlling current flowing between a source electrode and a drain electrode is formed in the semiconductor substrate. A trench is formed in a peripheral region of the unit cell to form mesa structure. A field relaxing layer is formed between an insulating film on a side face of the second trench and both the first semiconductor layer and the second semiconductor layer in order to relax concentration of an electric field in the insulating film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.