Vacuum coating device for coating substrates on all sides

US6056826A · kind A · utility

Assignee

• Leybold Systems GmbH · DE

Inventors

• Alfred Rick · Karlstein, DE
• Helmut Eberhardt · Gelnhausen, DE
• Friedrich Anderle · Hanau, DE
• Martin Bahr · Merkendorf, DE

Key dates

• Filing date: Jul 17, 1998
• Grant date: May 2, 2000
• Expiry date: Jul 17, 2018

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/505
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A vacuum coating device coats substrates on all sides by rotating the substrates in a material flow. The device is for use in a vacuum chamber with a material source, and includes a holder for holding the substrates opposite the material source and drives correlated with the holder to bring about a rotation and shifting movement of the substrates. The device includes a hollow manipulator arm formed from three legs which extend at an angle with respect to one another. More specifically, the first leg extends at an obtuse angle with respect to the second leg, and the second leg extends at an approximately right-angle with respect to the third leg. The substrates are then held at the end of the third leg by the holder. The manipulator arm, when driven by a motor, can rotate around the longitudinal axis of the first leg, and, moreover, can move back and forth in the direction of this longitudinal axis. The holder includes a planetary gear system and substrate holders, which are made to rotate by the planetary gear system.