Method of promoting the decomposition of silicon compounds in a process for depositing silicon upon a metal surface

US6056870A · kind A · utility

Inventors

• Larry E. Reed · Bartlesville, US
• Ronald E. Brown · Bartlesville, US
• Timothy P. Murtha · Bartlesville, US
• Timothy P. Harper · Bartlesville, US
• James P. Degraffenried · Bartlesville, US
• Mark D. Scharre · Bartlesville, US
• Gil J. Greenwood · Bartlesville, US

Key dates

• Filing date: Aug 25, 1994
• Grant date: May 2, 2000
• Expiry date: Aug 25, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S585/95
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

For a given percentage decomposition, the decomposition temperature of an organosilicon compound is reduced by admixing with the organosilicon compound a decomposition promoting organotin compound. The amount of decomposition promoting organotin compound admixed with the organosilicon compound is sufficient to effectively lower the decomposition temperature of the organosilicon required for a given percentage decomposition.