Patent · US Expired

Compact shearing wavefront sensor and method

US6057913A · kind A · utility

18Cited by
0References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 4, 1998
Grant dateMay 2, 2000
Priority date
Expiry dateFeb 4, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J9/0215
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A compact wavefront sensor includes an array of microlenses supported above a microchip. The microchip includes an array of gratings and photodetectors, which correspond to a particular microlens. Light incident on a grating will be diffracted back towards the array of microlenses, where it is focussed onto a corresponding photodetector. The photodetector receives light from gratings adjacent thereto, and detects a resulting interference therebetween. The detected interference is then used to reconstruct the wavefront. The detected interference can also be used to correct wavefronts by controlling a modulating element reflecting the wavefront.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.