Compact shearing wavefront sensor and method
US6057913A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 1998 |
| Grant date | May 2, 2000 |
| Priority date | — |
| Expiry date | Feb 4, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/0215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A compact wavefront sensor includes an array of microlenses supported above a microchip. The microchip includes an array of gratings and photodetectors, which correspond to a particular microlens. Light incident on a grating will be diffracted back towards the array of microlenses, where it is focussed onto a corresponding photodetector. The photodetector receives light from gratings adjacent thereto, and detects a resulting interference therebetween. The detected interference is then used to reconstruct the wavefront. The detected interference can also be used to correct wavefronts by controlling a modulating element reflecting the wavefront.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.