Diffractive light modulator
US6061166A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 1998 |
| Grant date | May 9, 2000 |
| Priority date | — |
| Expiry date | Oct 15, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A modulator for modulating an incident beam of light having a wavelength .lambda. including a base having a surface; an electrode formed over the surface of the base; a plurality of equally spaced apart deformable elements arranged over the electrode and being disposed parallel to each other and secured at opposite ends of each spaced apart deformable element and suspended above the base and having at least two spaced apart conductive and reflective portions and a central reflective portion electrically insulated from the two spaced apart conductive and reflective portions and disposed therebetween; a reflective layer disposed over the base between the spaced apart deformable elements; and applying a potential between the electrode and the spaced apart conductive and reflective portions so that the spaced apart conductive and reflective portions are movable between first and second positions which are substantially .lambda./4 apart.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.