Active vibration-isolating device
US6062551A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 1997 |
| Grant date | May 16, 2000 |
| Priority date | — |
| Expiry date | Jun 25, 2017 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/0275
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The active vibration-isolating device of the invention is used for preventing vibrations due to ground motions or running of an automobile from being propagated to a platform which is disposed in, for example, a semiconductor device factory or a laser device factory, and on which various kinds of equipment are to be mounted, and also from causing the platform to vibrate. The device has: an air spring which elastically supports a platform; a piston-like member which abuts against and supports the platform; plural piezoelectric actuators which can be externally controlled; a working fluid such as an aqueous solution of ethylene glycol which transmits driving displacements of the piezoelectric actuators to the piston-like member via piston members which are respectively fixed to ends of the piezoelectric actuators in a driving direction x; and a fluid path in which the working fluid is hermetically filled. The load of equipment mounted on the platform is shared by the air spring and the piston-like member, thereby enabling the spring rate to be reduced. Therefore, the resonance frequency can be set lower. As a result, vibration-isolating performance and vibration-damping performance c…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.