Three-dimensional micro fabrication device for filamentary substrates
US6063200A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 1998 |
| Grant date | May 16, 2000 |
| Priority date | — |
| Expiry date | Feb 10, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A fixture apparatus for material deposition or processing on a long, flexible, nonplanar, filamentary substrate has a tubular member for holding the filamentary substrate rotatably disposed on a base. An opening is formed in the tubular member through which material is deposited on the surface of the filamentary substrate. Moveable tubes are each slidingly disposed in the tubular member on either side of the opening. The tubes and/or the tubular member hold the filamentary substrate on both sides of a deposition area on the substrate to maintain the straight configuration of the long, flexible, filamentary substrate. The tubes and/or tubular member also physically masks the filamentary substrate to prevent material deposition outside the deposition area on the substrate. The base has a circular path and a rotating member. A wheel is coupled to one side of the tubular member and is rotatably disposed on the circular path of the base. The other side of the tubular member is rotatable coupled to the rotating member of the base by a bearing. The rotating member causes the wheel to turn about a vertical axis in a circular path. The wheel is fixed to the tubular member causing the tubula…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.