Pyrogenic oxides and a process for their preparation

US6063354A · kind A · utility

Assignee

• Degussa AG · DE

Inventors

• Helmut Mangold · Rodenbach, DE
• Peer Plambeck-Fischer · Rheinfelden (Baden), DE
• Ingo Pauli · Alzenau, DE
• Karlheinz Janzon · Gelnhausen, DE

Key dates

• Filing date: Jan 20, 1998
• Grant date: May 16, 2000
• Expiry date: Jan 20, 2018

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01P2006/22
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

Pyrogenic oxides having a BET surface area of between 30 and 150 m.sup.2 /g have a viscosity of less than 2,500 mPas in an aqueous suspension. They are prepared by setting the hydrogen ratio gamma and the oxygen ratio lambda to less than one in a high-temperature flame hydrolysis. The pyrogenic oxides are employed in the CMP application in the electronics industry.