Patent · US Expired

Crushing of silicon on ultrapure ice

US6063697A · kind A · utility

7Cited by

6References

7Claims

0Family size

Assignee

Wacker Chemie AG · DE

Inventors

Reinhard Wolf · Isny im Allgäu, DE
Dirk Flottmann · Altötting, DE
Matthaus Schantz · Simbach, DE

Key dates

Filing date	Mar 31, 1998
Grant date	May 16, 2000
Priority date	—
Expiry date	Mar 31, 2018

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB28D5/0082
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A device for protecting semiconductor material includes a support and a surface made of ice formed from ultrapure water. Semiconductor material is situated on this support surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.