Vibration-isolator joint for vacuum device
US6065780A · kind A · utility
6Cited by
3References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 16, 1998 |
| Grant date | May 23, 2000 |
| Priority date | — |
| Expiry date | Oct 16, 2018 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16L51/028
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vibration-isolator joint for a vacuum device is connected to a vacuum pump and to a vacuum chamber used to evacuate the vacuum chamber. The joint includes a bellows having an internal portion via which evacuation is effected, a first end connected to the vacuum pump, a second end connected to the vacuum chamber, and a support structure that, when the bellows has been compressed by a prescribed amount, prevents further compression of the bellows and also communicates to the bellows vibration in a direction other than the direction in which the bellows expands and contracts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.