Patent · US Expired

Process for producing a ceramic substrate and a ceramic substrate

US6066219A · kind A · utility

9Cited by

6References

11Claims

0Family size

Assignee

Curamik Electronics GmbH · DE

Inventors

Jurgen Schulz-Harder · Achern, DE
Karsten Schmidt · San Diego, US
Karl Exel · Altenkirchen, DE

Key dates

Filing date	Feb 3, 1997
Grant date	May 23, 2000
Priority date	—
Expiry date	Feb 3, 2017

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

The invention relates to a novel ceramic substrate with at least one layer essentially of aluminum nitride which is provided on at least one surface side with an intermediate or auxiliary layer which contains aluminum oxide and which has a thickness in the range of 0.5-10 microns, and to a process for its production.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.