Apparatus for measuring material thickness profiles
US6067161A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1998 |
| Grant date | May 23, 2000 |
| Priority date | — |
| Expiry date | Dec 18, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/60
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for determining a thickness profile of a moving material having at least two optical interfaces. A transport apparatus transports a length of moving material at a predetermined flatness through a measurement region. A recessed track disposed in the channel provides an area of non-contact in the measurement region. An interferometer apparatus collects a portion of a beam of light reflected from the optical interfaces of the moving length and generates an interference signal representative of the collected light. An analyzer then analyzes the interference signal to determine a thickness profile of the material in the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.