Method of manufacturing data recording medium made of ordered alloy thin film
US6068739A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 1999 |
| Grant date | May 30, 2000 |
| Priority date | — |
| Expiry date | Jun 9, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B11/10582
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of manufacturing a data recording medium for recording and reproducing data by use of a magnetic field or light and formed of an ordered alloy thin film comprising the steps of forming at least one underlayer principally containing an element or a compound selected from the group consisting of Cr, Pt, Pd, Au, Fe, Ni, MgO, NiO and controlled in such a way that a crystal plane having a crystal lattice face of a Miller index (100) is in parallel to a substrate, and forming an ordered alloy layer with L1.sub.0 crystal structure by sputter deposition within the range satisfying Equation 1: P.times.D>3000, where P is Ar sputter-gas pressure (Pa) and D is a target-substrate distance (mm), is disclosed. When a recording medium is formed of an ordered alloy thin film by using a glass substrate for a hard disk for industrial use, according to the method of the present invention, formation of an ordered phase required for exhibiting large magnetocrystalline anisotropy is accelerated at a low temperature allowing usage of the glass substrate, so that the recording medium is improved in thermal stability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.