Fluid deflecting device for use in work piece holder during a semiconductor wafer grinding process
US6071184A · kind A · utility
12Cited by
11References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 2, 1998 |
| Grant date | Jun 6, 2000 |
| Priority date | — |
| Expiry date | Sep 2, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B9/065
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A fluid deflection device for use in a work piece holder during a semiconductor wafer grinding process is disclosed. The fluid deflection device includes an annular, upstanding splash fence, and an attachment portion associated with the splash fence and configured to attach to the work piece holder, thereby to hold the splash fence in a position to inhibit fluid from flowing between rotatable and non-rotatable parts of the work piece holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.