Laser surface treatment device and method
US6073464A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 1998 |
| Grant date | Jun 13, 2000 |
| Priority date | — |
| Expiry date | Jan 16, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser surface method involves applying a laser beam treatment in one or several steps to a series of generally similar surfaces of given depth. Properties of the laser treatment are selected so as to change the physical state of each surface. Ellipsometry measurements are made in a region of the first surface before application of the laser beam treatment to the second surface, so as to obtain a physico-chemical characterization of the first surface. Both the laser beam application and the ellipsometry measurement are conducted under generally similar working conditions, so that the change of the physical state of each surface produced by the laser treatment can be controlled in a real time, in-situ, rapidly and nondestructively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.