Gas controlling device for integration
US6073646A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 15, 1997 |
| Grant date | Jun 13, 2000 |
| Priority date | — |
| Expiry date | Sep 15, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a gas controlling device for integration such that it can be simply removed or mounted without disassembling a gas line in a high purity gas supply system for a semiconductor. The gas controlling device for integration comprises a main body which is vertically constituted and has a gas inlet passage and a gas outlet passage formed in a lower body, a nut mounted on an outer periphery of the lower body, a passage block having a gas inlet passage and a gas outlet passage, and a sealing means disposed between the lower body and the passage block. The lower body is inserted into the mounting hole of the passage block and is fixed to the passage block by screwing the nut. Since the gas controlling device for integration is fixed to the passage block by screwing the nut mounted on the outer periphery of the lower body, it can be removed or mounted only by loosening or tightening one nut without disassembling the gas line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.