Vacuum pump with magnetic bearing system and back-up bearings
US6074165A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 1998 |
| Grant date | Jun 13, 2000 |
| Priority date | — |
| Expiry date | Mar 10, 2018 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump is provided with back-up bearings in addition to magnetic bearings for supporting its rotor with respect to the pump housing. The rotor has a hollow rotary shaft extending backwards enclosing in its inner space a forwardly protruding tubular shaft affixed to the pump housing, and another cylindrical member affixed to the rotor protrudes backward inside this fixed tubular shaft. One set of back-up bearings is provided on the outer surface of the fixed tubular shaft spaced from the inner surface of the rotor shaft and another set of back-up bearings is provided on the inner surface of the fixed tubular shaft, spaced from the protruding cylindrical member. The back-up bearings thus positioned can be made smaller for improved dynamic emergency capabilities.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.