Ultra pure gases: removal of halocarbons, fluorocarbons, and sulfur compounds from gas streams
US6074459A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 1999 |
| Grant date | Jun 13, 2000 |
| Priority date | — |
| Expiry date | Jan 4, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/4145
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A process for removing sulfur-containing compounds and halocarbons such as fluorocarbons and chlorocarbons from gases to provide gas streams which contain these compounds at unprecedentedly low levels using an adsorption train of four beds has been developed. The first bed serves to remove water, the second and third beds remove sulfur-containing compounds generally, and the fourth adsorbent bed removes sulfur-containing compounds and halocarbons such as chlorocarbons and fluorocarbons to very low levels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.