Unit for vaporizing liquid materials
US6074487A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 1998 |
| Grant date | Jun 13, 2000 |
| Priority date | — |
| Expiry date | Feb 10, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4486
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The object of the invention is to provide a unit for vaporizing liquid materials which can adjust not only a mixing rate but also a concentration of the mixed liquid easily and accurately and which can effectively vaporize a large amount of the liquid material. A unit for vaporizing liquid materials in accordance with the invention is for mixing a plurality of liquid materials and comprises a plurality of containers each of which contains a different liquid material which is made by dissolving a material into a solvent, a container exclusive for solvent which contains the same or the same kind of solvent used for the liquid materials, a liquid conveying means which conveys the liquid materials from the containers and the solvent from the container exclusive for solvent, and a vaporizing means which sprays the liquid materials and the solvent conveyed by the liquid conveying means and vaporizes the sprayed liquid materials and the sprayed solvent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.