Method of fabricating suspended single crystal silicon micro electro mechanical system (MEMS) devices
US6074890A · kind A · utility
64Cited by
14References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 8, 1998 |
| Grant date | Jun 13, 2000 |
| Priority date | — |
| Expiry date | Jan 8, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0078
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of fabricating MEMS devices having a master/slave structure in which the motion of a signal device is slaved to a control device through the fabrication of a mechanical coupler. The preferred fabrication uses a backside dry etch to release the suspended MEMS devices and mechanical coupler.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.