Patent · US Expired

Positioning apparatus

US6076397A · kind A · utility

3Cited by

4References

10Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Karl Gerd Binnig · Wollerau, CH
Walter Haeberle · Wädenswil, CH
Heinrich Rohrer · Richterswil, CH

Key dates

Filing date	Dec 1, 1997
Grant date	Jun 20, 2000
Priority date	—
Expiry date	Dec 1, 2017

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/872
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a positioning apparatus, providing for an excursion of a tool (12) with respect to a sample or medium to be interacted with. The positioning apparatus comprises apparatus for applying a driving force (F.sub.D) which causes the excursion of the tool (12). Counteracting apparatus is provided which exerts a counteracting force (F.sub.C) to the driving force (F.sub.D). The counteracting apparatus comprises a deformable substance (25) which is mechanically coupled to the tool (12) and effects the counteracting force (F.sub.C) and further comprises adjustment means (28) allowing to adjust the deformability of the deformable substance (25).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.