Media compatible packages for pressure sensing devices
US6076409A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 22, 1997 |
| Grant date | Jun 20, 2000 |
| Priority date | — |
| Expiry date | Dec 22, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Media compatible packages for pressure sensing devices include molded polymeric housings and diaphragms which mount and isolate pressure sensing devices in operative contact with any type of corrosive or non-corrosive media for pressure measurement. The various pressure sensor package housings include a main cavity in which a pressure sensor is mounted, a polymeric diaphragm bonded to the housing within the main cavity, at least one media port which leads to a pressure port on one side of the diaphragm, and a pressure transfer cavity on an opposite side of the diaphragm in which a pressure sensor is located. A fill port through a wall of the housing between the diaphragm and the pressure sensor allows the pressure transfer cavity to be filled with a pressure transfer medium such as oil and then sealed, without introducing any excess pressure. The use of bondable polymers to form the housing and thin film diaphragms provides excellent media compatibility for pressure measurements in corrosive environments. Differential dual port packages having a media conduit and diaphragm on opposite sides of a single sensor are also provided. Internal walls of the connectable halves of the pressu…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.