Rare-earth boride thin film system
US6077617A · kind A · utility
2Cited by
13References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 2, 1999 |
| Grant date | Jun 20, 2000 |
| Priority date | — |
| Expiry date | Nov 2, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B35/04
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Disclosed is a system made by a method for depositing rare-earth boride onto the surface of a substrate which is submerged in an organic solution of borane and a rare-earth halide. Application of electromagnetic radiation, preferably in the visible wavelength range, through a mask near the surface of the submerged substrate, drives the formation and deposition of rare-earth boride onto a substrate in desired patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.