Vacuum pump with magnetic bearing system, backup bearings and sensors
US6078120A · kind A · utility
14Cited by
10References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1999 |
| Grant date | Jun 20, 2000 |
| Priority date | — |
| Expiry date | Feb 26, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vacuum pump a the magnetic bearing assembly includes the magnetic bearing assembly with rotor position sensors and backup bearings being placed inside the rotatable shaft of the vacuum pump. The sensor placements are independent of the bearing position, so that the respective radial sensors can be at the same axial position as the respective radial bearings, which provides sensors co-location and a space saving within a turbopump housing, in particular, in its axial direction, while sensors and mechanical backup bearings are placed in a better protected area with respect to pumped corrosive gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.