Method and system for segmented scatter measurement
US6078391A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 17, 1998 |
| Grant date | Jun 20, 2000 |
| Priority date | — |
| Expiry date | Nov 17, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for characterizing a surface are disclosed. The system includes a light source and source optics which direct a beam of light toward the surface. A first optical integrating device is positioned and configured to receive a first portion of the scattered light and a second optical integrating device is positioned and configured to receive a second portion of the scattered light. The second optical integrating device reflects the second portion of the scattered light through a segmenting optic. The segmenting optic is configured to segment the second portion of the scattered light to thereby isolate the anisotropic roughness amplitude to one or more segments. A roughness ratio indicative of the anisotropic roughness is produced by comparing the roughness amplitudes of the segments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.