Micron-scale differential scanning calorimeter on a chip

US6079873A · kind A · utility

Assignee

• Government of the United States of America, as represented by the Secretary of Commerce · US

Inventors

• Richard E. Cavicchi · Washington Grove, US
• Gregory Ernest Poirier · Potomac, US
• John S. Suehle · Westminster, US
• Michael Gaitan · North Potomac, US
• Nim Tea · Los Angeles, US

Key dates

• Filing date: Jun 30, 1998
• Grant date: Jun 27, 2000
• Expiry date: Jun 30, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N25/4866
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A differential scanning microcalorimeter produced on a silicon chip enables microscopic scanning calorimetry measurements of small samples and thin films. The chip may be fabricated using standard CMOS processes. The microcalorimeter includes a reference zone and a sample zone. The reference and sample zones may be at opposite ends of a suspended platform or may reside on separate platforms. An integrated polysilicon heater provides heat to each zone. A thermopile consisting of a succession of thermocouple junctions generates a voltage representing the temperature difference between the reference and sample zones. Temperature differences between the zones provide information about the chemical reactions and phase transitions that occur in a sample placed in the sample zone.