Patent · US Expired

Method for calibrating a measured value of detecting means

US6082122A · kind A · utility

240Cited by
9References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 15, 1998
Grant dateJul 4, 2000
Priority date
Expiry dateOct 15, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01D18/008
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

There is provided a calibration method of a detecting section which is provided on a substrate incorporated into a system interconnection generator and which detects by detecting means an object to be detected or an value of the object to be detected. The calibration method comprises the steps of prior to the substrate being incorporated into the system interconnection generator, measuring by the detecting section a reference value of the object to be detected by the detecting section; storing at least one of an error with respect to the reference value measured by the measuring step and the measured value of the reference value in association with the measurement result; and after the substrate being incorporated into the system interconnection generator, outputting the measurement result of the detecting section based on at least one of the error and the measured reference value, stored by the storing step in association with the measurement result.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.