Fusion bonding and alignment fixture
US6082140A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 1999 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Jun 16, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S425/06
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all the components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.