Particle measuring device having funnel-shaped collector for semiconductor clean room applications
US6082179A · kind A · utility
5Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 18, 1997 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Aug 18, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2001/2223
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle measurer used in a semiconductor clean room includes a funnel-shaped collector for facilitating the measurement of a particle level of an air sample in the clean room. The particle measurer is arranged so that a narrow end part of the funnel-shaped collector is connected to an intake of the particle measurer. A wide end of the funnel-shaped connector receives the air sample through a sample air pipe. A pump is used for suctioning the air sample through the intake of said particle counter and for discharging the air sample through an exhaust.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.