Cleaning method
US6082373A · kind A · utility
56Cited by
8References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1998 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Jul 2, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67051
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided is a cleaning method for effectively removing particles on the surface of an object to be cleaned. This cleaning method includes dissolving oxygen into deaerated pure water to prepare a cleaning fluid, and cleaning an object to be cleaned by bringing the object into contact with the cleaning fluid to which ultrasonic vibration is being applied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.