Multi-piece lathe chuck for silicon ingots
US6083092A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1999 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Nov 12, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T82/10
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Improved chucks for supporting elongate objects having conical end portions, such as single crystal ingots of semiconductor material, while such objects are held and rotated, as in a lathe. A base portion of the chuck includes bores to accept fasteners to fasten the base to a headstock or tailstock of a lathe. The base includes a receptacle for holding an annular chuck insert which has a conical socket surface to engage the body, such as a conical end portion of a single crystal ingot, to be held and rotated. Alternatively, the base may have three or more rollers spaced equally about a central axis and rotatable about roller axes all located in a plane perpendicular to the central axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.